Publications
Book Chapters:
- R. Tabrizian, “Fabrication Process Flows for Implementation of Piezoelectric MEMS Resonators,” in Piezoelectric MEMS Resonators, Springer, 2017, pp. 283-298.
- R. Tabrizian and F. Ayazi, “Compensation, Tuning and Trimming of MEMS Resonators,” in Resonant MEMS: Fundamentals, Implementation, and Application, Wiley-VCH, 2015, pp. 305-325.
Journal Publications:
- T. Tharpe, X. Zheng, P. Feng, and R. Tabrizian, “Resolving Mechanical Properties and Morphology Evolution of Free-Standing Ferroelectric Hf0.5Zr0.5O2,” Advanced Engineering Materials, 23 (12), 2101221, Dec. 2021. [Main Cover Featured, December 2021 Issue]
- Tabrizian and S. Bhunia, “The Hidden Authenticators: Nanometer-Scale Electromechanical Tags Could Thwart Counterfeiters,” IEEE Spectrum 58.6 (2021): 32-37.
- Rassay, D. Mo, C. Li, N. Choudhary, C. Forgey, and R. Tabrizian, “Intrinsically Switchable Ferroelectric Scandium Aluminum Nitride Lamb-Mode Resonators,” in IEEE Electron Device Letters, vol. 42, no. 7, pp. 1065-1068, July 2021.
- Rassay, F. Hakim, C. Li, C. Forgey, and R. Tabrizian, “A segmented-target sputtering process for growth of sub-50 nm ferroelectric scandium aluminum nitride films with composition and stress tuning,” Physica Status Solidi RRL, vol. 15, no. 5, p. 2100087, April 2021.
- Hakim, T. Tharpe, and R. Tabrizian, “Ferroelectric-on-Si Super-High-Frequency Fin Bulk Acoustic Resonators with Hf0.5Zr0.5O2 Nano-Laminated Transducers,” IEEE Microwave and Wireless Components Letters, vol. 31, no. 6, pp. 701-704, June 2021.
- Ramezani, V. Felmetsger, N. Rudawski, and R. Tabrizian, “Growth of C-Axis Textured AlN Films on Vertical Sidewalls of Silicon Micro-Fins,” IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, vol. 68, no. 3, pp. 753-759, March 2021.
- Rassay, M. Ramezani, S. Shomaji, S. Bhunia, and R. Tabrizian, “Clandestine Nano-Electro-Mechanical Tags for Identification and Authentication”, Nature’s Microsystems and Nanoengineering, vol. 6(1), pp. 1-8, November 2020.
- Hakim, M. Ghatge, and R. Tabrizian, “Excitation of High-Frequency In-Plane Bulk Acoustic Resonance Modes in Geometrically Engineered Hafnium Zirconium Oxide Nano-Electro-Mechanical Membrane,” Applied Physics Letters, vol. 117, p. 063502, August 2020.
- Ghatge, G. Walters, T. Nishida, and R. Tabrizian, “A 30-nm thick integrated hafnium zirconium oxide nano-electro-mechanical membrane resonator”, Appl. Phys. Lett., vol. 116 (4), Feb. 2020, p. 043501.
- M. Ghatge, G. Walters, T. Nishida, and R. Tabrizian, “An ultrathin nanoelectromechanical transducer based on hafnium zirconium oxide,” Nature Electronics, 2 (8), pp. 506-512.
- M. Ramezani, V. Felmetsger, N. Rudawski, and R. Tabrizian, “Growth of C-Axis Textured AlN Films on Vertical Sidewalls of Si Micro-Fins,” Microsystems and Nanoengineering (Preprint arXiv:1907.05456).
- M. Ghatge, M. Ramezani, and R. Tabrizian, “Dispersion-Engineered Guided-Wave Resonators in Anisotropic Single-Crystal Substrates – Part II: Numerical and Experimental Characterization,” IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, June 2019, 66 (6), pp. 1149-1154.
- M. Ghatge and R. Tabrizian, “Dispersion-Engineered Guided-Wave Resonators in Anisotropic Single-Crystal Substrates – Part I: Concept and Analytical Design,” IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control , June 2019, 66 (6), pp. 1140-1148.
- M. Ghatge, G. Walters, T. Nishida, and R. Tabrizian, “A Non-Reciprocal Filter using Asymmetrically Transduced Micro-Acoustic Resonators,” IEEE Electron Device Letters, March 2019, 40(5), 800-803.
- C. S. Liu, R. Tabrizian, F. Ayazi, “A ±0.3ppm Oven-Controlled MEMS Oscillator Using Structural Resistance-Based Temperature Sensing,” IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, Vol 65, No. 8, August 2018, pp. 1492-1499.
- M. Ghatge, and R. Tabrizian, “Exploiting elastic anharmonicity in aluminum nitride matrix for phase-synchronous frequency reference generation,” Appl. Phys. Lett., vol. 112 (12), March 2018, p. 123503.
- R. Tabrizian, A. Daruwalla, F. Ayazi, “High-Q energy trapping of temperature-stable shear waves with Lamé cross-sectional polarization in a single crystal silicon waveguide,” Appl. Phys. Lett., vol. 108 (12), March 2016, p. 113503.
- A. Peczalski, Z. Wu, R. Tabrizian, and M. Rais-Zadeh, “Investigation into the quality factor of piezoelectric-on-silica micromachined Resonators,” IEEE Journal of Microelectromechanical Systems, vol. 24 (6), pp. 1695-1702, Dec. 2015.
- R. Tabrizian, F. Ayazi, “Thermo-acoustic engineering of silicon microresonators via evanescent waves,” Appl. Phys. Lett., 106 (26), June 2015, p. 263504.
- A. Norouz-Pour Shirazi, M. Hodjat-Shamami, R. Tabrizian, and F. Ayazi, “Dynamic tuning of MEMS resonators via electromechanical feedback,” IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, Vol. 62, No. 1, January 2015, pp. 129-137.
- J. L. Fu, R. Tabrizian, and F. Ayazi, “Dual-mode AlN-on-silicon micromechanical resonators for temperature sensing,” IEEE Transactions on Electron Devices, Vol. 61, No. 2, February 2014, pp. 591-597.
- R. Tabrizian, G. Casinovi, and F. Ayazi, “Temperature-stable silicon oxide (SilOx) micromechanical resonators,” IEEE Transactions on Electron Devices, Vol. 60, No. 8, August 2013, pp. 2656-2663. (Best Paper Award Finalist)
- R. Tabrizian, M. Hodjat-Shamami, and F. Ayazi, “High-frequency AlN-on-silicon resonant square gyroscopes,” IEEE Journal on Microelectromechanical Systems, Vol. 22, Issue 5, October 2013, pp. 1007-1009.
- D. E. Serrano, R. Tabrizian, and F. Ayazi, “Electrostatically tunable piezoelectric-on-silicon micromechanical resonator for real time clock,” IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, Vol. 59, Issue 3, March 2012, pp. 358-365.
Refereed Conference Publications:
- T. Tharpe, S. Dabas, D. Mo and R. Tabrizian, “A 17.3 GHz Atomic-Layered HZO Solidly Mounted Resonator: Towards CMOS-BEOL mm-wave Frequency Control,” In Proc. Solid-State Sensors, Actuators, and Microsystems Workshop (Hilton Head 2022), 2022, pp. 446-447 (Troy_HH2022 Late News_SMR_Final)
- T. Tharpe and R. Tabrizian, “A 9.4 GHz Intrinsically Switchable Lamb-wave Resonator using Atomic-Layer-deposited Ferroelectric Hafnia-Zirconia,” In Proc. Solid-State Sensors, Actuators, and Microsystems Workshop (Hilton Head 2022), 2022, pp. 336-339. (HH2022_HZO_Lamb_Switch_FullPaper_Final)
- Q. Zheng, T. Tharpe, P. F. Feng, and R. Tabrizian, “Ultrahigh Quality Factors in Ferroelectric Hf0.5Zr0.5O2 Resonators with Remote Electrical Drive,” IEEE International Frequency Control Symposium & European Frequency (IFCS 2022). (Accepted for Oral Presentation)
- Mo, S. S. Dabas, S. Rassay, and R. Tabrizian, “A 7 GHz – 13.4 GHz Complementary-Switchable Thickness-Extensional Bulk Acoustic Resonator using Laminated Ferroelectric Sc0.28Al0.72N,” IEEE International Frequency Control Symposium & European Frequency (IFCS 2022). (Accepted for Oral Presentation)
- S. Dabas, D. Mo, S. Rassay, and R. Tabrizian, “Intrinsically Tunable Laminated Ferroelectric Sc0.28Al0.72N Extensional Resonator based on Local Polarization Switching,” Proc. IEEE International Conference on Micro Electro Mechanical Systems (MEMS ‘22), In Press, January 2022.
- Tharpe, F. Hakim, and R. Tabrizian, “In-Plane Bulk Acoustic Resonators Using 50nm-Thick Nano-Laminated Ferroelectric Hf0.5Zr0.5O2,” 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), 2021, pp. 313-316. [Outstanding Paper Award]
- Ghatge, M. Rais-Zadeh, and R. Tabrizian, “High-Q Gallium Nitride Thickness-Shear Baw Resonators with Reduced Temperature Sensitivity,” 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), 2021, pp. 1400-1403.
- Mo, S. Rassay, and R. Tabrizian, “Intrinsically Switchable Ferroelectric Scandium Aluminum Nitride Bulk Acoustic Wave Resonators,” 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), 2021, pp. 317-320.
- S. Rassay, D. Mo, and R. Tabrizian, “A 7GHz Acoustically Coupled Filter with Intrinsic Switchability Using Ferroelectric Scandium-Aluminum Nitride,” Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head Island, South Carolina, 2021, pp. 167-172. (HH-22_Acoustically Coupled Filter_Final)
- Hakim and R. Tabrizian, “X-band ferroelectric-on-Si fin bulk acoustic resonators (FoS-FinBAR) with f.Q of 0.8×1013,” in Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head Island, South Carolina, 2021, pp. 52–55. [Best Paper Award] (HH2022_Manuscript_Faysal_Final_FH_RT)
- S. Dabas, D. Mo, S. Rassay, and R. Tabrizian, “A Sc0.28Al0.72N Laminated Bulk Acoustic Wave Resonator with Self-Oven-Controlled Switchability,” In Proc. Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head Island, South Carolina, 2021, pp. 175-178. (HiltonHead2022_Final Paper Draft_Submission RT 04222022)
- Rassay, F. Hakim, and R. Tabrizian, “Al0.7Sc0.3N Acoustically Coupled Filters with Large Bandwidth and Frequency Tunability,” IEEE International Frequency Control Symposium & European Frequency (IFCS 2020), pp. 1-4, July 2020.
- Rassay, F. Hakim, V. Felmetsger, and R. Tabrizian, “Acoustically Coupled Wideband RF Filters with Bandwidth Reconfigurability using Ferroelectric Aluminum Scandium Nitride Film,” Proc. IEEE International Conference on Micro Electro Mechanical Systems (MEMS ‘20), pp. 1254 – 1257, January 2020.
- Hakim, S. Rassay, M. Ramezani, and R. Tabrizian, “A Non-Reciprocal Lamb-Wave
Delay Line Exploiting Acoustoelectric Effect in Single Crystal Germanium,” Proc.
IEEE International Conference on Micro Electro Mechanical Systems (MEMS ‘20), pp. 1246 – 1249, January 2020.
- Qamar, M. Ghatge, R. Tabrizian, and M. Rais-Zadeh, “Thermo-Acoustic Engineering of GaN SAW Resonators for Stable Clocks in Extreme Environments”, Proc.
IEEE International Conference on Micro Electro Mechanical Systems (MEMS ‘20), pp. 1211 – 1214, January 2020.
- Ghatge, G. Walters, T. Nishida, and R. Tabrizian, “A High-Q 30nm-Thick MFM Resonator Using Ferroelectric Hafnium Zirconium Oxide,” Proc. IEEE International Conference on Micro Electro Mechanical Systems (MEMS ‘20), January 2020, pp. 953 – 956.
- Hakim, S. Rassay, M. Ramezani, and R. Tabrizian, “Non-Reciprocal Acoustoelectric Amplification in Germanium-Based Lamb Wave Delay Lines,” Proc. IEEE International Electron Device Meeting (IEDM ‘19), p. 40-1, December 2019.
- Felmetsger, M. Mikhov, M. Ramezani, and R. Tabrizian, “Sputter Process Optimization for Al0.7Sc0.3N Piezoelectric Films,” Int. Ultrasonic Symposium, pp. 2600 – 2603, Oct. 2019.
- Ghatge, G. Walters, T. Nishida, and R. Tabrizian, “High-Q UHF and SHF Bulk Acoustic Resonators with Ten-Nanometer Hf0.5Zr0.5O2 Ferroelectric Transducer,” Solid-State, Sensors, Actuators, and Microsystems (Transducers 2019), June 2019, pp. 446-449. [Outstanding Paper Award Finalist]
- Ramezani, M. Ghatge, F. Felmetsger, and R. Tabrizian, “A Super-High-Frequency Non-Released Silicon Fin Bulk Acoustic Resonator,” Proc. IEEE Int. Microwave Symposium (IMS 2019), pp. 516-519, June 2019.
- Ghatge, G. Walters, T. Nishida, and R. Tabrizian, “A 10nm-Thick Hafnium Zirconium Oxide Piezoelectric Transducer for Extreme Miniaturization of Integrated Sensors and Actuators,” Proc. IEEE International Conference on Micro Electro Mechanical Systems (MEMS ‘19), pp. 292-295, January 2019.
- Ghatge, G. Walters, T. Nishida, and R. Tabrizian, “A Nano-Mechanical Resonator with 10nm Hafnium-Zirconium Oxide Ferroelectric Transducer,” Proc. IEEE International Electron Device Meeting (IEDM ‘18), pp. 4-6. Dec. 2018.
- J. Alabi, M. Ramezani, J. B. Harley, and R. Tabrizian, “Characterizing Micro- and Nano-Materials Based on Their Ultrasonic Dispersion Properties: A Feasibility Study,” Proc. IEEE International Ultrasonic Symposium (IUS 2018), pp. 206-212. October. 2018.
- Ramezani, A. R. Newsome, M. Ghatge, S. Bhunia, and R. Tabrizian, “A Nano-Mechanical Identification Tag Technology for Traceability and Authentication Applications,” Solid-State Sensors, Actuators, and Microsystems Workshop (Hilton Head 2018), Hilton Head Island, SC, June 2018, pp. 109-110.
- Ghatge, V. Felmetsger, and R. Tabrizian, “High kt2.Q Lamb-Wave ScAlN-on-Silicon UHF and SHF Resonators,” Solid-State Sensors, Actuators, and Microsystems Workshop (Hilton Head 2018), Hilton Head Island, SC, June 2018, pp. 231-235.
- Ghatge, V. Felmetsger, and R. Tabrizian, “High kt2.Q Waveguide-Based ScAlN-on-Silicon UHF and SHF Resonators,” IEEE International Frequency Control Symposium & European Frequency (IFCS 2018), pp. 1-4.
- R. Newsome, M. Ramezani, M. Ghatge, S. Bhunia, and R. Tabrizian, “Multi-Mode Micromechanical Resonant Tags for Traceability and Authentication Applications,” IEEE Nano/Micro Engineered and Molecular Systems (NEMS 2018), pp. 275-279.
- Ramezani, M. Ghatge, R. Tabrizian, “High kt2.Q Silicon Fin Bulk Acoustic Resonators (FinBAR) for Chip-Scale Multi-Band Spectrum Analysis,” Proc. IEEE International Conference on Micro Electro Mechanical Systems (MEMS ‘18), pp. 158-161, January 2018.
- Ramezani, M. Ghatge, R. Tabrizian, “Fin Bulk Acoustic Resonator (FinBAR) Technology: Enabling Multi-Band Acoustic Signal Processing Beyond the UHF,” Proc. International Workshop on Piezoelectric MEMS (PiezoMEMS’18), p. 36, January 2018.
- Ghatge and R. Tabrizian, “A Nano-Acoustic Instrumentation for Morphological Spectroscopy of Atomic-Layered Ferroelectric Films,” Proc. International Workshop on Piezoelectric MEMS (PiezoMEMS’18), p. 57, January 2018.
- Ghatge, V. Felmetsger, and R. Tabrizian, “Extraction of Transverse Piezoelectric Coefficient of Scandium-Doped Aluminum-Nitride Using Waveguide-Based Resonators,” Proc. International Workshop on Piezoelectric MEMS (PiezoMEMS’18), p. 68, January 2018.
- Ramezani, M. Ghatge, R. Tabrizian, “High-Q Silicon Fin Bulk Acoustic Resonators for Signal Processing beyond the UHF,” Proc. IEEE International Electron Device Meeting (IEDM ‘17), p. 40-1, December 2017.
- Ghatge and R. Tabrizian, “A Nonlinearly Coupled Aluminum Nitride Matrix for Phase-Synchronous Clock Generation,” Proc. Napa Microsystems Workshop (NAPA 2017), Napa, California, August 2017.
- Ghatge, K. Kallam, and R. Tabrizian, “Observation of Acoustoelectric Amplification at Aluminum Nitride-Germanium Interface,” Proc. Napa Microsystems Workshop (NAPA 2017), Napa, California, August 2017.
- Ghatge and R. Tabrizian, “The Effect of Elastic Anharmonicity on The Nonlinear Behavior of Waveguide-Based AlN Resonator,” Proc. 2017 Joint IEEE International Frequency Control Symposium & European Frequency and Time Forum (IFCS/EFTF 2017), Besancon, France, July 2017.
- Jo, M. Ghatge, and R. Tabrizian, “Anti-Symmetric Shear-Extensional AlN Lamb-Wave Resonators with kt2 > 4%,” Proc. 2017 Joint IEEE International Frequency Control Symposium & European Frequency and Time Forum (IFCS/EFTF 2017), Besancon, France, July 2017, pp. 749-752.
- Ghatge, G. Walters, T. Nishida, and R. Tabrizian, “Phononic Detection of Morphological Phase Transitions in Atomic-Layered Hafnium-Zirconium-Oxide,” 19th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2017), Kaohsiung, Taiwan, June 2017, pp. 746-749.
- Jo, M. Ghatge, and R. Tabrizian, “d15-Enhanced Shear-Extensional Aluminum Nitride Resonators with kt2 > 4.4% for Wide-Band Filters,” 19th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2017), Taiwan, June 2017, pp. 94-97.
- Ghatge, P. Karri, and R. Tabrizian, “Power-Insensitive Silicon Crystal-Cut for Amplitude-Stable Frequency Synthesis,” IEEE International Micro Electro Mechanical Systems Conference (MEMS 2017), Las Vegas, USA, January 2017, pp. 76-79.
- Ghatge and R. Tabrizian, “Bilayer nano-waveguide resonators for sensing applications,” IEEE International sensors conference, Orlando, USA, Nov. 2016, pp. 1-3.
- S. Liu, R. Tabrizian, and F. Ayazi, “Temperature compensated MEMS oscillator using structural resistance-based temperature sensing,” IEEE International sensors conference, Busan, South Korea, Nov. 2015, pp. 978-981.
- Ansari, R. Tabrizian, and M. Rais-Zadeh, “A high-Q AlGaN/GaN phonon trap with integrated HEMT read-out,” 18th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers2015), Alaska, USA, June 2015, pp. 2256-2259.
- Tabrizian and M. Rais-Zadeh, “The effect of charge redistribution on limiting the kt2.Q of piezoelectrically transduced resonators,” 18th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers2015), Alaska, USA, June 2015, pp. 981-984.
- Hodjat-Shamami, A. Norouz-Pour Shirazi, R. Tabrizian, and F. Ayazi, “A dynamically mode-matched piezoelectrically-transduced high-frequency flexural disk gyroscope,” IEEE International Micro Electro Mechanical Systems Conference (MEMS 2015), Estoril, Portugal, January 2015, pp. 789-792.
- Tabrizian, A. Norouz-Pour Shirazi, and F. Ayazi, “Temperature-compensated tetherless bulk acoustic phonon trap for self-ovenized oscillators,” Solid-State Sensors, Actuators, and Microsystems Workshop (Hilton Head 2014), Hilton Head Island, SC, June 2014, pp. 109-110.
- Tabrizian and F. Ayazi, “Dual-mode vertical membrane resonant pressure sensor” Proc. of IEEE International Micro Electro Mechanical Systems Conference (MEMS 2014), San Francisco, CA, January 2014, pp. 120-123. (Outstanding Paper Award)
- Tabrizian and F. Ayazi, “Acoustically-engineered multi-port AlN-on-silicon resonators for accurate temperature sensing,” Proc. of IEEE International Electron Devices Meeting (IEDM 2013), Washington, DC, December 2013, pp. 1811-1814. (Best Paper Award Finalist)
- Tabrizian and F. Ayazi, “Reconfigurable SiBAR filters with sidewall aluminum nitride signal transduction,” Proc. of Solid-State Sensors, Actuators, and Microsystems Workshop (Hilton Head 2012), Hilton Head Island, SC, June 2012, pp. 98-99.
- Tabrizian, M. Pardo, and F. Ayazi, “A 27 MHz temperature compensated MEMS oscillator with sub-ppm instability,” Proc. IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2012), Paris, France, January 2012, pp. 23-26.
- Tabrizian, V. Felmetsger, and F. Ayazi, “A sidewall AlN process for efficient 3D piezoelectric transduction of MEMS,” Proc. Technologies for Future Micro-Nano Manufacturing Workshop, Napa, California, August 2011, pp. 23-27.
- Tabrizian and F. Ayazi, “Laterally excited silicon bulk acoustic resonator with sidewall AlN,” Proc. 16th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), Beijing, China, June 2011, pp. 1520-1523. [Outstanding Paper Award]
- Tabrizian and F. Ayazi, “Tunable silicon bulk acoustic resonators with multi-face AlN transduction,” Proc. 2011 Joint IEEE International Frequency Control Symposium & European Frequency and Time Forum (IFCS/EFTF 2011), San Francisco, CA, May 2011, pp. 749-752.
- E. Serrano, R. Tabrizian, and F. Ayazi, “Tunable piezoelectric MEMS resonators for real-time clock,” Proc. 2011 Joint IEEE International Frequency Control Symposium & European Frequency and Time Forum (IFCS/EFTF 2011), San Francisco, CA, May 2011, pp. 765-768. [Best Paper Award Finalist]
- Ayazi, R. Tabrizian, L. Sorenson, “Compensation, tuning, and trimming of MEMS resonators,” Proc. 2011 Joint IEEE International Frequency Control Symposium & European Frequency and Time Forum (IFCS/EFTF 2011), San Francisco, CA, May 2012, pp. 1-7.
- Ayazi, L. Sorenson, R. Tabrizian, “Energy dissipation in micromechanical resonators,” Proc. SPIE Defense, Security, and Sensing 2011, Orlando, FL, April 2011, pp. 1-13.
- Tabrizian, G. Casinovi, and F. Ayazi, “Temperature-stable High-Q AlN-on-Silicon resonators with embedded array of oxide pillars,” Proc. Solid-State Sensors, Actuators, and Microsystems Workshop (Hilton Head 2010), Hilton Head Island, SC, June 2010, pp. 100-101.
- Shim, R. Tabrizian, F. Ayazi and M. Rais-Zadeh, “Low-loss MEMS band-pass filters with improved out-of-band rejection by exploiting inductive parasitics,” Proc. IEEE International Electron Devices Meeting (IEDM 2009), Baltimore, MD, Dec. 2009, pp. 801-804.
- R. Tabrizian, M. Rais-Zadeh, and F. Ayazi, “Effect of phonon interactions on limiting the f.Q product of micromechanical resonators,” International Conference on Solid-state Sensors, Actuators and Microsystems (Transducers 2009), Denver, CO, June 2009, pp. 2131-2134.
Published and Pending Patents:
- Tabrizian and T. Tharpe, “Integrated frequency selective limiter utilizing quadratic and an-harmonic energy scattering,” US patent App. 17/304,993, December 2021.
- Tabrizian, “Tunable and switchable SAW-BAW RF resonators,” US patent App. 17/314,394, November 2021.
- Tabrizian, “Digitally Tunable Acoustic Wave Resonators,” US patent App. 17/173,919, August 2021.
- Tabrizian and S. Bhunia, “Nano-Electro-Mechanical Tags for Identification and Authentication,” US patent App. 17/152,294, July 2021.
- Tabrizian, “Acoustically coupled radio frequency (rf) filter,” US patent App. 17/117,977, June 2021.
- Tabrizian, “Lamb-Wave Resonators in Single-Crystal Substrates,” US patent App. 16/714,635, June 2020.
- Tabrizian and M. Ghatge, “Phononic Frequency Synthesizer,” US patent 10,985,741, issue date April 20, 2021.
- Tabrizian, “Fin Bulk Acoustic Resonator Technology for UHF and SHF Signal Processing,” US patent App. 16/637,496, August 2020.
- Tabrizian, “Micro-electro-mechanical resonators,” US Patent App. 16/737,748, July 2020.
- Tabrizian and S. Bhunia, “Nano-Electro-Mechanical Labels and Encoders,” US patent 10,586,135, March 2020.
- Ayazi, R. Tabrizian, M. Hodjat-Shamami, A. Norouzpour-Shirazi, “Resonant Gyroscopes and Methods of Making and Using the Same,” US patent 9,917,571 B2, issue date March 13, 2018.
- Tabrizian and F. Ayazi, “Acoustically-Engineered Multi-Port Piezoelectric-on-Semiconductor Resonators for Accurate Temperature Sensing and Reference Signal Generation,” US patent 9,318,998, issue date April 19, 2016.
- Ayazi, R. Tabrizian, “Micromechanical Resonators Having Piezoelectric Layers therein that Support Actuation and Sensing through a Longitudinal Piezoelectric Effect,” US patent 8,519,598, issue date August 8, 2013.
- F. Ayazi, R. Tabrizian, and G. Casinovi, “Temperature and process compensated composite silicon bulk acoustic resonators,” US patent 8,381,378, issue date February 26, 2013.