Publications

Publications

Book Chapters:

  1. R. Tabrizian, “Fabrication Process Flows for Implementation of Piezoelectric MEMS Resonators,” in Piezoelectric MEMS Resonators, Springer, 2017, pp. 283-298.
  2. R. Tabrizian and F. Ayazi, “Compensation, Tuning and Trimming of MEMS Resonators,” in Resonant MEMS: Fundamentals, Implementation, and Application, Wiley-VCH, 2015, pp. 305-325.

Journal Publications:

  1. Tabrizian and S. Bhunia, “The Hidden Authenticators: Nanometer-Scale Electromechanical Tags Could Thwart Counterfeiters,” IEEE Spectrum 58.6 (2021): 32-37.
  2. Rassay, D. Mo, C. Li, N. Choudhary, C. Forgey, and R. Tabrizian, “Intrinsically Switchable Ferroelectric Scandium Aluminum Nitride Lamb-Mode Resonators,” in IEEE Electron Device Letters, vol. 42, no. 7, pp. 1065-1068, July 2021.
  3. Rassay, F. Hakim, C. Li, C. Forgey, and R. Tabrizian, “A segmented-target sputtering process for growth of sub-50 nm ferroelectric scandium aluminum nitride films with composition and stress tuning,” Physica Status Solidi RRL, vol. 15, no. 5, p. 2100087, April 2021.
  4. Hakim, T. Tharpe, and R. Tabrizian, “Ferroelectric-on-Si Super-High-Frequency Fin Bulk Acoustic Resonators with Hf0.5Zr0.5O2 Nano-Laminated Transducers,” IEEE Microwave and Wireless Components Letters, vol. 31, no. 6, pp. 701-704, June 2021.
  5. Ramezani, V. Felmetsger, N. Rudawski, and R. Tabrizian, “Growth of C-Axis Textured AlN Films on Vertical Sidewalls of Silicon Micro-Fins,IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, vol. 68, no. 3, pp. 753-759, March 2021.
  6. Rassay, M. Ramezani, S. Shomaji, S. Bhunia, and R. Tabrizian, “Clandestine Nano-Electro-Mechanical Tags for Identification and Authentication”, Nature’s Microsystems and Nanoengineering, vol. 6(1), pp. 1-8, November 2020.
  7. Hakim, M. Ghatge, and R. Tabrizian, “Excitation of High-Frequency In-Plane Bulk Acoustic Resonance Modes in Geometrically Engineered Hafnium Zirconium Oxide Nano-Electro-Mechanical Membrane,” Applied Physics Letters, vol. 117, p. 063502, August 2020.
  8. Ghatge, G. Walters, T. Nishida, and R. Tabrizian, “A 30-nm thick integrated hafnium zirconium oxide nano-electro-mechanical membrane resonator”, Appl. Phys. Lett., vol. 116 (4), Feb. 2020, p. 043501.
  9. M. Ghatge, G. Walters, T. Nishida, and R. Tabrizian, “An ultrathin nanoelectromechanical transducer based on hafnium zirconium oxide,” Nature Electronics, 2 (8), pp. 506-512.
  10. M. Ramezani, V. Felmetsger, N. Rudawski, and R. Tabrizian, “Growth of C-Axis Textured AlN Films on Vertical Sidewalls of Si Micro-Fins,” Microsystems and Nanoengineering (Preprint arXiv:1907.05456).
  11. M. Ghatge, M. Ramezani, and R. Tabrizian, “Dispersion-Engineered Guided-Wave Resonators in Anisotropic Single-Crystal Substrates – Part II: Numerical and Experimental Characterization,” IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, June 2019,  66 (6), pp. 1149-1154.
  12. M. Ghatge and R. Tabrizian, “Dispersion-Engineered Guided-Wave Resonators in Anisotropic Single-Crystal Substrates – Part I: Concept and Analytical Design,” IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control , June 2019, 66 (6), pp. 1140-1148.
  13. M. Ghatge, G. Walters, T. Nishida, and R. Tabrizian, “A Non-Reciprocal Filter using Asymmetrically Transduced Micro-Acoustic Resonators,” IEEE Electron Device Letters, March 2019, 40(5), 800-803.
  14. C. S. Liu, R. Tabrizian, F. Ayazi, “A ±0.3ppm Oven-Controlled MEMS Oscillator Using Structural Resistance-Based Temperature Sensing,” IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, Vol 65, No. 8, August 2018, pp. 1492-1499.
  15. M. Ghatge, and R. Tabrizian, “Exploiting elastic anharmonicity in aluminum nitride matrix for phase-synchronous frequency reference generation,” Appl. Phys. Lett., vol. 112 (12), March 2018, p. 123503.
  16. R. Tabrizian, A. Daruwalla, F. Ayazi, “High-Q energy trapping of temperature-stable shear waves with Lamé cross-sectional polarization in a single crystal silicon waveguide,” Appl. Phys. Lett., vol. 108 (12), March 2016, p. 113503.
  17. A. Peczalski, Z. Wu, R. Tabrizian, and M. Rais-Zadeh, “Investigation into the quality factor of piezoelectric-on-silica micromachined Resonators,” IEEE Journal of Microelectromechanical Systems, vol. 24 (6), pp. 1695-1702, Dec. 2015.
  18. R. Tabrizian, F. Ayazi, “Thermo-acoustic engineering of silicon microresonators via evanescent waves,” Appl. Phys. Lett., 106 (26), June 2015, p. 263504.
  19. A. Norouz-Pour Shirazi, M. Hodjat-Shamami, R. Tabrizian, and F. Ayazi, “Dynamic tuning of MEMS resonators via electromechanical feedback,” IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, Vol. 62, No. 1, January 2015, pp. 129-137.
  20. J. L. Fu, R. Tabrizian, and F. Ayazi, “Dual-mode AlN-on-silicon micromechanical resonators for temperature sensing,” IEEE Transactions on Electron Devices, Vol. 61, No. 2, February 2014, pp. 591-597.
  21. R. Tabrizian, G. Casinovi, and F. Ayazi, “Temperature-stable silicon oxide (SilOx) micromechanical resonators,” IEEE Transactions on Electron Devices, Vol. 60, No. 8, August 2013, pp. 2656-2663. (Best Paper Award Finalist)
  22. R. Tabrizian, M. Hodjat-Shamami, and F. Ayazi, “High-frequency AlN-on-silicon resonant square gyroscopes,” IEEE Journal on Microelectromechanical Systems, Vol. 22, Issue 5, October 2013, pp. 1007-1009.
  23. D. E. Serrano, R. Tabrizian, and F. Ayazi, “Electrostatically tunable piezoelectric-on-silicon micromechanical resonator for real time clock,” IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, Vol. 59, Issue 3, March 2012, pp. 358-365.

Refereed Conference Publications:

  1. S. Rassay, F. Hakim, V. Felmetsger, and R. Tabrizian, “Acoustically Coupled Wideband RF Filters with Bandwidth Reconfigurability using Ferroelectric Aluminum Scandium Nitride Film,” Proc. IEEE International Conference on Micro Electro Mechanical Systems (MEMS ‘20), pp. TBA, January 2020. [Accepted]
  2. F. Hakim, S. Rassay, M. Ramezani, and R. Tabrizian, “A Non-Reciprocal Lamb-Wave
    Delay Line Exploiting Acoustoelectric Effect in Single Crystal Germanium,” Proc.
    IEEE International Conference on Micro Electro Mechanical Systems (MEMS ‘20)
    , pp. TBA, January 2020. [Accepted]
  3. A. Qamar, M. Ghatge, R. Tabrizian, and M. Rais-Zadeh, “Thermo-Acoustic Engineering of GaN SAW Resonators for Stable Clocks in Extreme Environments”, Proc.
    IEEE International Conference on Micro Electro Mechanical Systems (MEMS ‘20)
    , pp. TBA, January 2020. [Accepted]
  4. M. Ghatge, G. Walters, T. Nishida, and R. Tabrizian, “A High-Q 30nm-Thick MFM Resonator Using Ferroelectric Hafnium Zirconium Oxide,” Proc. IEEE International Conference on Micro Electro Mechanical Systems (MEMS ‘20), pp. TBA, January 2020. [Accepted]
  5. F. Hakim, S. Rassay, M. Ramezani, and R. Tabrizian, “Non-Reciprocal Acoustoelectric Amplification in Germanium-Based Lamb Wave Delay Lines,” Proc. IEEE International Electron Device Meeting (IEDM ‘19), p. 40-1, December 2019. [Accepted for Oral Pres.]
  6. V. Felmetsger, M. Mikhov, M. Ramezani, and R. Tabrizian, “Sputter Process Optimization for Al0.7Sc0.3N Piezoelectric Films,” International Ultrasonic Symposium, Oct. 2019. [Accepted for Oral Pres.]
  7. M. Ghatge, G. Walters, T. Nishida, and R. Tabrizian, “High-Q UHF and SHF Bulk Acoustic Resonators with Ten-Nanometer Hf0.5Zr0.5O2 Ferroelectric Transducer,” Solid-State, Sensors, Actuators, and Microsystems (Transducers 2019), June 2019, pp. 446-449.(Outstanding Paper Award Finalist)
  8. M. Ramezani, M. Ghatge, F. Felmetsger, and R. Tabrizian, “A Super-High-Frequency Non-Released Silicon Fin Bulk Acoustic Resonator,” Proc. IEEE Int. Microwave Symposium (IMS 2019), June 2019. [Accepted for Oral Presentation]
  9. M. Ghatge, G. Walters, T. Nishida, and R. Tabrizian, “A 10nm-Thick Hafnium Zirconium Oxide Piezoelectric Transducer for Extreme Miniaturization of Integrated Sensors and Actuators,” Proc. IEEE International Conference on Micro Electro Mechanical Systems (MEMS ‘19), pp. 292-295, January 2019.
  10. M. Ghatge, G. Walters, T. Nishida, and R. Tabrizian, “A Nano-Mechanical Resonator with 10nm Hafnium-Zirconium Oxide Ferroelectric Transducer,” Proc. IEEE International Electron Device Meeting (IEDM ‘18), pp. 4-6. Dec. 2018.
  11. D. J. Alabi, M. Ramezani, J. B. Harley, and R. Tabrizian, “Characterizing Micro- and Nano-Materials Based on Their Ultrasonic Dispersion Properties: A Feasibility Study,” Proc. IEEE International Ultrasonic Symposium (IUS 2018), pp. 206-212. October. 2018.
  12. M. Ramezani, A. R. Newsome, M. Ghatge, S. Bhunia, and R. Tabrizian, “A Nano-Mechanical Identification Tag Technology for Traceability and Authentication Applications,” Solid-State Sensors, Actuators, and Microsystems Workshop (Hilton Head 2018), Hilton Head Island, SC, June 2018, pp. 109-110.
  13. M. Ghatge, V. Felmetsger, and R. Tabrizian, “High kt2.Q Lamb-Wave ScAlN-on-Silicon UHF and SHF Resonators,” Solid-State Sensors, Actuators, and Microsystems Workshop (Hilton Head 2018), Hilton Head Island, SC, June 2018.
  14. M. Ghatge, V. Felmetsger, and R. Tabrizian, “High kt2.Q Waveguide-Based ScAlN-on-Silicon UHF and SHF Resonators,” IEEE International Frequency Control Symposium & European Frequency (IFCS 2018). [Accepted for Poster Presentation]
  15. A. R. Newsome, M. Ramezani, M. Ghatge, S. Bhunia, , and R. Tabrizian, “Multi-Mode Micromechanical Resonant Tags for Traceability and Authentication Applications,” IEEE Nano/Micro Engineered and Molecular Systems (NEMS 2018) [Accepted for Oral Presentation]
  16. M. Ramezani, M. Ghatge, R. Tabrizian, “High kt2.Q Silicon Fin Bulk Acoustic Resonators (FinBAR) for Chip-Scale Multi-Band Spectrum Analysis,” Proc. IEEE International Conference on Micro Electro Mechanical Systems (MEMS ‘18), pp. 158-161, January 2018.
  17. M. Ramezani, M. Ghatge, R. Tabrizian, “Fin Bulk Acoustic Resonator (FinBAR) Technology: Enabling Multi-Band Acoustic Signal Processing Beyond the UHF,” Proc. International Workshop on Piezoelectric MEMS (PiezoMEMS’18), p. 36, January 2018.
  18. M. Ghatge and R. Tabrizian, “A Nano-Acoustic Instrumentation for Morphological Spectroscopy of Atomic-Layered Ferroelectric Films,” Proc. International Workshop on Piezoelectric MEMS (PiezoMEMS’18), p. 57, January 2018.
  19. M. Ghatge, V. Felmetsger, and R. Tabrizian, “Extraction of Transverse Pieozoelectric Coefficient of Scandium-Doped Aluminum-Nitride Using Waveguide-Based Resonators,” Proc. International Workshop on Piezoelectric MEMS (PiezoMEMS’18), p. 68, January 2018.
  20. M. Ramezani, M. Ghatge, R. Tabrizian, “High-Q Silicon Fin Bulk Acoustic Resonators for Signal Processing beyond the UHF,” Proc. IEEE International Electron Device Meeting (IEDM ‘17), p. 40-1, December 2017.
  21. M. Ghatge and R. Tabrizian, “A Nonlinearly Coupled Aluminum Nitride Matrix for Phase-Synchronous Clock Generation,” Proc. Napa Microsystems Workshop (NAPA 2017), Napa, California, August 2017.
  22. M. Ghatge, K. Kallam, and R. Tabrizian, “Observation of Acoustoelectric Amplification at Aluminum Nitride-Germanium Interface,” Proc. Napa Microsystems Workshop (NAPA 2017), Napa, California, August 2017.
  23. M. Ghatge and R. Tabrizian, The Effect of Elastic Anharmonicity on The Nonlinear Behavior of Waveguide-Based AlN Resonator,” Proc. 2017 Joint IEEE International Frequency Control Symposium & European Frequency and Time Forum (IFCS/EFTF 2017), Besancon, France, July 2017.
  24. B. Jo, M. Ghatge, and R. Tabrizian, Anti-Symmetric Shear-Extensional AlN Lamb-Wave Resonators with kt2 > 4%,” Proc. 2017 Joint IEEE International Frequency Control Symposium & European Frequency and Time Forum (IFCS/EFTF 2017), Besancon, France, July 2017, pp. 749-752.
  25. M. Ghatge, G. Walters, T. Nishida, and R. Tabrizian, “Phononic Detection of Morphological Phase Transitions in Atomic-Layered Hafnium-Zirconium-Oxide,” 19th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2017), Kaohsiung, Taiwan, June 2017, pp. 746-749.
  26. B. Jo, M. Ghatge, and R. Tabrizian, “d15-Enhanced Shear-Extensional Aluminum Nitride Resonators with kt2 > 4.4% for Wide-Band Filters,” 19th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2017), Kaohsiung, Taiwan, June 2017, pp. 94-97.
  27. M. Ghatge, P. Karri, and R. Tabrizian, “Power-Insensitive Silicon Crystal-Cut for Amplitude-Stable Frequency Synthesis,” IEEE International Micro Electro Mechanical Systems Conference (MEMS 2017), Las Vegas, USA, January 2017, pp. 76-79.
  28. M. Ghatge and R. Tabrizian, “Bilayer nano-waveguide resonators for sensing applications,” IEEE International sensors conference, Orlando, USA, Nov. 2016, pp. 1-3.
  29. C. S. Liu, R. Tabrizian, and F. Ayazi, “Temperature compensated MEMS oscillator using structural resistance-based temperature sensing,” IEEE International sensors conference, Busan, South Korea, Nov. 2015, pp. 978-981.
  30. A. Ansari, R. Tabrizian, and M. Rais-Zadeh, “A high-Q AlGaN/GaN phonon trap with integrated HEMT read-out,” 18th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers2015), Alaska, USA, June 2015, pp. 2256-2259.
  31. R. Tabrizian and M. Rais-Zadeh, “The effect of charge redistribution on limiting the kt2.Q of piezoelectrically transduced resonators,” 18th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers2015), Alaska, USA, June 2015, pp. 981-984.
  32. M. Hodjat-Shamami, A. Norouz-Pour Shirazi, R. Tabrizian, and F. Ayazi, “A dynamically mode-matched piezoelectrically-transduced high-frequency flexural disk gyroscope,” IEEE International Micro Electro Mechanical Systems Conference (MEMS 2015), Estoril, Portugal, January 2015, pp. 789-792.
  33. R. Tabrizian, A. Norouz-Pour Shirazi, and F. Ayazi, “Temperature-compensated tetherless bulk acoustic phonon trap for self-ovenized oscillators,” Solid-State Sensors, Actuators, and Microsystems Workshop (Hilton Head 2014), Hilton Head Island, SC, June 2014, pp. 109-110.
  34. R. Tabrizian and F. Ayazi, “Dual-mode vertical membrane resonant pressure sensorProc. of IEEE International Micro Electro Mechanical Systems Conference (MEMS 2014), San Francisco, CA, January 2014, pp. 120-123. (Outstanding Paper Award)
  35. R. Tabrizian and F. Ayazi, “Acoustically-engineered multi-port AlN-on-silicon resonators for accurate temperature sensing,” Proc. of IEEE International Electron Devices Meeting (IEDM 2013), Washington, DC, December 2013, pp. 1811-1814. (Best Paper Award Finalist)
  36. R. Tabrizian and F. Ayazi, “Reconfigurable SiBAR filters with sidewall aluminum nitride signal transduction,” Proc. of Solid-State Sensors, Actuators, and Microsystems Workshop (Hilton Head 2012), Hilton Head Island, SC, June 2012, pp. 98-99.
  37. R. Tabrizian, M. Pardo, and F. Ayazi, A 27 MHz temperature compensated MEMS oscillator with sub-ppm instability,” Proc.IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2012), Paris, France, January 2012, pp. 23-26.
  38. R. Tabrizian, V. Felmetsger, and F. Ayazi, “A sidewall AlN process for efficient 3D piezoelectric transduction of MEMS,” Proc. Technologies for Future Micro-Nano Manufacturing Workshop, Napa, California, August 2011, pp. 23-27.
  39. R. Tabrizian and F. Ayazi, Laterally excited silicon bulk acoustic resonator with sidewall AlN,” Proc. 16th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), Beijing, China, June 2011, pp. 1520-1523. (Outstanding Paper Award)
  40. R. Tabrizian and F. Ayazi, Tunable silicon bulk acoustic resonators with multi-face AlN transduction,” Proc. 2011 Joint IEEE International Frequency Control Symposium & European Frequency and Time Forum (IFCS/EFTF 2011), San Francisco, CA, May 2011, pp. 749-752.
  41. D. E. Serrano, R. Tabrizian, and F. Ayazi, Tunable piezoelectric MEMS resonators for real-time clock,” Proc. 2011 Joint IEEE International Frequency Control Symposium & European Frequency and Time Forum (IFCS/EFTF 2011), San Francisco, CA, May 2011, pp. 765-768. (Best Paper Award Finalist)
  42. F. Ayazi, R. Tabrizian, L. Sorenson, Compensation, tuning, and trimming of MEMS resonators,” Proc. 2011 Joint IEEE International Frequency Control Symposium & European Frequency and Time Forum (IFCS/EFTF 2011), San Francisco, CA, May 2012, pp. 1-7.
  43. F. Ayazi, L. Sorenson, R. Tabrizian, Energy dissipation in micromechanical resonators,” Proc. SPIE Defense, Security, and Sensing 2011, Orlando, FL, April 2011, pp. 1-13.
  44. R. Tabrizian, G. Casinovi, and F. Ayazi, “Temperature-stable High-Q AlN-on-Silicon resonators with embedded array of oxide pillars,” Proc. Solid-State Sensors, Actuators, and Microsystems Workshop (Hilton Head 2010), Hilton Head Island, SC, June 2010, pp. 100-101.
  45. Y. Shim, R. Tabrizian, F. Ayazi and M. Rais-Zadeh, “Low-loss MEMS band-pass filters with improved out-of-band rejection by exploiting inductive parasitics,” Proc. IEEE International Electron Devices Meeting (IEDM 2009), Baltimore, MD, Dec. 2009, pp. 801-804.
  46. R. Tabrizian, M. Rais-Zadeh, and F. Ayazi, “Effect of phonon interactions on limiting the f.Q product of micromechanical resonators,” International Conference on Solid-state Sensors, Actuators and Microsystems (Transducers 2009), Denver, CO, June 2009, pp. 2131-2134.

Published and Pending Patents:

  1. R. Tabrizian, M. Ghatge, “Non-Reciprocal Frequency Limiter Using Asymmetrically Transduced,” UF 17579, filing date January 15, 2019.
  2. R. Tabrizian, T. Nishida, M. Ghatge, G. Walters, “Nano-Mechanical Resonator with 10nm Hafnium-Zirconium Oxide Ferroelectric Transducer,” UF 17576, filing date December 19, 2018.
  3. R. Tabrizian, “Dispersion-Engineered Lamb Wave Resonators in Anisotropic Single-Crystal Substrates,” UF 17237, filing data December 19, 2018.
  4. R. Tabrizian, M. Ghatge, “Multi-Band Synchronous Frequency-Reference Chain for Carrier-Aggregated 5G,” UF 16750, filing date July 31, 2018.
  5. R. Tabrizian, “Fin Bulk Acoustic Resonator Technology for UHF and SHF Signal Processing,” UF 16750, filing date August 17, 2017.
  6. R. Tabrizian and S. Bunia, “The Nano-Electro-Mechanical Systems (NEMS) Barcode,” UF 16763 , filing date June 1, 2017.
  7. R. Tabrizian and F. Ayazi, “Dual-Mode Vertical Membrane Resonant Pressure Sensor,” GTRC ID 6520, filing date November 22, 2013.
  8. F. Ayazi, R. Tabrizian, M. Hodjat-Shamami, A. Norouzpour-Shirazi, “Resonant Gyroscopes and Methods of Making and Using the Same,” US patent app. 14,739,721, publication date February 9, 2017.
  9. R. Tabrizian and F. Ayazi, “Acoustically-Engineered Multi-Port Piezoelectric-on-Semiconductor Resonators for Accurate Temperature Sensing and Reference Signal Generation,” US patent 9,318,998, issue date April 19, 2016.
  10. F. Ayazi, R. Tabrizian, “Micromechanical Resonators Having Piezoelectric Layers therein that Support Actuation and Sensing through a Longitudinal Piezoelectric Effect,” US patent 8,519,598, issue date August 8, 2013.
  11. F. Ayazi, R. Tabrizian, and G. Casinovi, “Temperature and process compensated composite silicon bulk acoustic resonators,” US patent 8,381,378, issue date February 26, 2013.