FinBAR Technology

FinBAR Technology

We have recently developed a 3D semiconductor-piezoelectric platform that enables extreme miniaturization and integration of the nano-acoustic waveguides for 5G signal processing applications. The new technology relies on the integration of properly textured piezoelectric films on the sidewall of high aspect-ratio fins formed in silicon or germanium. Read More

Lamb Wave Resonators

Lamb Wave Resonators

We follow realization of a purely analytical resonator design methodology, based on dispersion characteristics of Lamb waves in anisotropic single-crystal substrates, to enable systematic design of high-Q resonators with arbitrary cross-sectional mode shapes and frequencies. Read More

Non-Reciprocal Germanium NEMS

Non-Reciprocal Germanium NEMS

We investigate novel nano-acoustic technologies that fuse the nonreciprocal acoustoelectric wave propagation physics in single-crystal germanium (Ge) with frequency-selective transducers to realize monolithic spectral processors with scalable frequencies over cm- and mm-wave regimes. Read More

Nonlinear and Anharmonic M/NEMS

Nonlinear and Anharmonic M/NEMS

Tabrizian lab has pioneered characterization of lattice anharmonicty in semiconductors and piezoelectric films, and exploited such anharmonicities for realization of nonlinear signal processors. Read More

Nano-Acoustic Material Spectroscopy:

Nano-Acoustic Material Spectroscopy:

Tabrizian lab explores the application of nano-acoustic spectroscopy to extract morphological information and quantify crystal phase transitions in atomic-layer ferroelectric films, where XRD fails to provide sufficient resolution. Read More